2020-2021 Academic Catalog 
    
    Nov 28, 2021  
2020-2021 Academic Catalog [ARCHIVED CATALOG]

EE 4100 - Nano-Fabrication of Integrated Solid State Devices



Credit Hour(s): 3
History, design, and fabrication of CMOS and micro-electro-mechanical systems (MEMS). CMOS front-end-of-line (FEOL), back-end-of-line (BEOL), surface micromachining and bulk micromachining. Typical VLSI devices and selected RF MEMS.
Prerequisite(s): Undergraduate level PHY 2410 Minimum Grade of D and Undergraduate level PHY 2410L Minimum Grade of D and ((Undergraduate level EE 3310 Minimum Grade of D and Undergraduate level EE 3310L Minimum Grade of D) or Undergraduate level PHY 2420 Minimum Grade of D)
Enrollment Restrictions: Must be enrolled in one of the following Colleges: College of Egr & Computer Sci.

Level: Undergraduate
Schedule Type(s): Lecture