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Aug 22, 2024
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2024-2025 Academic Catalog
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PHY 4200 - Microfabrication Sciences Credit Hour(s): 2 to 4
Course Description: This is a lecture/laboratory course in the Physics Department that is intended to give students a hands-on opportunity to learn techniques commonly used in micro- and nano-fabrication cleanrooms worldwide. We will cover processing steps in detail, including oxidation, dopant diffusion, ion implantation, lithography, thin film deposition, and etching. We will emphasize how these steps combine to build modern devices. We will also give examples of how software packages are used to simulate and model the physics and chemistry of fabrication.
Course Level: Undergraduate Schedule Type(s): Lecture Course Attributes: Department Approval Required Grade Mode: Standard
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