EE 6100 - Nano-Fabrication of Integrated Solid State Devices

Credit Hour(s): 3

Course Description: This course covers the history, design, and fabrication of CMOS and micro-electro-mechanical systems (MEMS). Typical fabrication methods cover CMOS, front-end-of-line (FEOL), back-end-of-line (BEOL), surface and bulk micromachining. Typical VLSI devices and selected RF MEMS are covered.

Enrollment Restrictions: Must be enrolled in one of the following levels: Graduate, Medical, Professional. Must be enrolled in one of the following colleges: College of Egr & Computer Sci.

Course Level: Graduate
Schedule Type(s): Lecture

Grade Mode: Standard
An additional fee is associated with this course.