EE 4100 - Nano-Fabrication of Integrated Solid State Devices

Credit Hour(s): 3

Course Description: History, design, and fabrication of CMOS and micro-electro-mechanical systems (MEMS). CMOS front-end-of-line (FEOL), back-end-of-line (BEOL), surface micromachining and bulk micromachining. Typical VLSI devices and selected RF MEMS.

Prerequisite(s): Undergraduate level PHY 2410 Minimum Grade of D and Undergraduate level PHY 2410L Minimum Grade of D and ((Undergraduate level EE 3310 Minimum Grade of D and Undergraduate level EE 3310L Minimum Grade of D) or Undergraduate level PHY 2420 Minimum Grade of D)

Enrollment Restrictions: Must be enrolled in one of the following colleges: College of Egr & Computer Sci.

Course Level: Undergraduate
Schedule Type(s): Lecture

Grade Mode: Standard
An additional fee is associated with this course.