|
|
Mar 29, 2024
|
|
2022-2023 Academic Catalog [ARCHIVED CATALOG]
|
EE 6100 - Nano-Fabrication of Integrated Solid State Devices Credit Hour(s): 3 This course covers the history, design, and fabrication of CMOS and micro-electro-mechanical systems (MEMS). Typical fabrication methods cover CMOS, front-end-of-line (FEOL), back-end-of-line (BEOL), surface and bulk micromachining. Typical VLSI devices and selected RF MEMS are covered. Enrollment Restrictions: Must be enrolled in one of the following Levels: Graduate, Medical, Professional. Must be enrolled in one of the following Colleges: College of Egr & Computer Sci.
Level: Graduate Schedule Type(s): Lecture
|
|
|